| 摘要 |
PURPOSE:To accurately recognize the form or the size of an object targeted to be recognized such as a wiring pattern, etc., even when it is changed by performing pattern recognition by setting a recognition pattern corresponding to the form or the size of the object to be recognized on an operator. CONSTITUTION:A pattern recognition part 3 recognizes the form of the wiring pattern by resolution of 10mum by using the operator with image elements of nXm. Namely, the title device is constituted of the operator 30 with the image elements of nXm, a recognition pattern storage part 31 in which plural kinds of recognition patterns with different kinds of forms are stored, a pattern selection part 32 which reads out the recognition pattern with the form suitable for the width of the wiring pattern from the storage part 31 and sets it on the operator 30, and a recognition module 33. In the recognition pattern storage means 31, plural kinds of recognition patterns with different kinds of pattern forms are stored, and for example, at the time of recognizing the form of the wiring pattern with thick line width or defect, the recognition pattern suitable for the thickness of the wiring pattern is selected and used. In such a way, it is possible to eliminate the erroneous detection of the form or the defect. |
