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发明名称
MOLECULAR BEAM EPITAXY APPARATUS
摘要
申请公布号
JPH01108197(A)
申请公布日期
1989.04.25
申请号
JP19870263870
申请日期
1987.10.21
申请人
HITACHI LTD
发明人
TAMURA NAOYUKI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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