| 摘要 |
PURPOSE:To obtain an inexpensive joint by placing ceramics between flanges, inserting O-rings into seal grooves formed on the flanges to keep vacuum, and installing electric insulating bolts between the flanges. CONSTITUTION:Flanges 1, 6, ceramics 3 and helicoflex O ring 4 are fixed by fastening insulating bolts 5. The O rings 4 are inserted into grooves 8 formed on the respective flanges 1, 6 to keep vacuum, while the ceramics 3 which are electric insulators are interposed between the flanges 1, 6. A vacuum joint with high insulation ability is composed of 3 components, the ceramics 3, vacuum seal members 4 and insulating bolts 5, which are all obtained inexpensively and excellent in workability. |
