发明名称 APPARATUS FOR SUPPLING OF LIQUID MATERIAL
摘要 <p>A replenishment tank (7) is provided for storing the liquid raw material (8), a pipe (6) extending between this tank and the raw material tank (1) to be replenished, a second pipe (10) supplying pressured gas to tank (7). A pipe (6') comunicates with both the other pipes and contains a flow regulator (17). The second pipe contains a pressure regulator (18). The system may be extended to several raw material tanks which require replenishment in which case the first pipe extends into each tank via a separate flow regulator.</p>
申请公布号 KR890001122(B1) 申请公布日期 1989.04.24
申请号 KR19850003239 申请日期 1985.05.13
申请人 SUMITOMO ELECTRIC IND.CO., LTD. 发明人 TAKIMODO HIROAKI;MIYAZIRI TESUO;TSURIDA TAMIO;HUZIKAWA MASANORI
分类号 G02B6/00;B01J4/00;C03B37/014;C03B37/018;C03B37/14;C23C16/448;G05D9/04;H01L21/205;(IPC1-7):C03B37/014 主分类号 G02B6/00
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