发明名称 |
APPARATUS FOR SUPPLING OF LIQUID MATERIAL |
摘要 |
<p>A replenishment tank (7) is provided for storing the liquid raw material (8), a pipe (6) extending between this tank and the raw material tank (1) to be replenished, a second pipe (10) supplying pressured gas to tank (7). A pipe (6') comunicates with both the other pipes and contains a flow regulator (17). The second pipe contains a pressure regulator (18). The system may be extended to several raw material tanks which require replenishment in which case the first pipe extends into each tank via a separate flow regulator.</p> |
申请公布号 |
KR890001122(B1) |
申请公布日期 |
1989.04.24 |
申请号 |
KR19850003239 |
申请日期 |
1985.05.13 |
申请人 |
SUMITOMO ELECTRIC IND.CO., LTD. |
发明人 |
TAKIMODO HIROAKI;MIYAZIRI TESUO;TSURIDA TAMIO;HUZIKAWA MASANORI |
分类号 |
G02B6/00;B01J4/00;C03B37/014;C03B37/018;C03B37/14;C23C16/448;G05D9/04;H01L21/205;(IPC1-7):C03B37/014 |
主分类号 |
G02B6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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