| 摘要 |
<p>PURPOSE:To prevent the damage of a wafer on positioning, and to avoid the deformation of the wafer by sucking and moving the wafer by a carrying means and detecting the wafer by a photosensor under a noncontact state. CONSTITUTION:A carrying robot 11 is composed of a robot body 20, a first arm 21 supported by the robot body and turned, a second arm supported by the first arm 21 and rotated and a third arm sustained by the second arm and revolved. A suction port 24 sucking a wafer 30 is formed at the nose of the third arm. A centering unit 12 has photosensors A-D. The sensors A-D respectively consist of phototransistors and light-emitting diodes, and the wafer is inserted between the phototransistor and the light-emitting diode and the phototransistor and the light-emitting diode are turned ON when they are light- shielded. A centering stage is lifted in order to be able to place the wafer 30. The carrying robot 11 is driven and the wafer 30 is sucked by a carry-in stage 10, and the wafer 30 is shifted until the suction port 24 is conformed to the center position of the centering unit 12.</p> |
