MASK BLANK, AND PHOTOMASK

摘要

A mask blank is provided to inhibit a tantalum-based semi-light transmitting film from being damaged by wet etching of a light shielding film, and to simplify the structure of a flat panel display device. A mask blank(20) for fabricating a flat panel display device comprises: a substrate(16); a semi-light transmitting film(17) formed on the substrate and comprising a tantalum-containing material; and a light shielding film(18) formed on the semi-light transmitting film and comprising a material containing chrome and nitrogen. The light shielding film comprising a material containing chrome and nitrogen has a multi-layer structure, wherein each layer contains chrome and nitrogen.