DISPLACEMENT DETECTION TECHNIQUE USING OPTICAL ENCODERS

摘要

FIELD: physics; measurement. ^ SUBSTANCE: displacement detection technique consists that photodetectors are arranged in screen plane by interference pattern projection area, while object surface displacement is defined as result of indirect measurement by optical field intensities with produced direct measurement within specified interference pattern areas using appropriate photodetector groups. Simultaneously total intensity of optical field is registered on interference pattern area which is controlled continuously within displacement measurement process. If total intensity of optical field remains unvaried on interference pattern area or deviates within tolerance, measured results are recorded with processing of intensity measurement results of appropriate photodetector groups. If deviations of total intensity of optical field on interference pattern area exceed tolerance, measurement process is stopped. ^ EFFECT: enhancement of displacement measurements using optical encoders based on interference methods. ^ 1 dwg