METHOD FOR CLEANING DISK,申请号JP19870262384-传众专利搜索

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发明名称	METHOD FOR CLEANING DISK
摘要
申请公布号	JPH01105376(A)	申请公布日期	1989.04.21
申请号	JP19870262384	申请日期	1987.10.17
申请人	TOKYO ELECTRON LTD	发明人	WATANABE NOBUKAZU
分类号	B08B3/12;G11B3/58;G11B5/84;G11B7/26;G11B23/50;H01L21/304	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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