| 摘要 |
<p>PURPOSE:To obtain the title small-sized, high-accuracy detector by forming a thin conductive film where a current to be measured flows and a magnetism sensing film made of a thin film current magnetism effect element on a substrate so that they are insulated electrically from each other. CONSTITUTION:The thin conductive film 3 where the current flows and the magnetism sensing film 1 made of the thin film current magnetism effect element are formed on the insulating substrate 4 while insulated electrically from each other. The conductive film 3 and magnetism sensing element 1 are laminated on the substrate across an insulating film 2 between them and the current magnetism effect element is a ferromagnetic resistance element. Further, the film 1 is formed on the conductive film 3 and when the pattern width of the film 1 is WM and the pattern width of the film 3 is WAl, the setting of WAl>=1,3 is allowed. Then a magnetic field proportional to the level of the current which flows through the conductive film 3 is produced with the current and when the magnetic field is applied to the magnetism sensing film 1, the intensity of the magnetic field and the level of said current can be detected electrically by current magnetism effect.</p> |
