GREASE SPREAD SYSTEM FOR WAFER TRANSFER UNIT AND GREASE SPREAD MEHTOD THEREOF

摘要

The spread device and grease spread method using the same are provided to maintain the superior viscosity condition of grease by the real time monitoring. Greece is coated onto the facility driving part for the wafer transfer by using grease spread part(200). The viscosity of the greece coated onto the facility driving part is sensed in real time by using the contactless viscosity measuring part(202). Data of the Greece viscosity measured in real time is transmitted to the transmit board(204). After the data is converted into the current value, the transformed current value is transmitted to controller(206). The current value toward the viscosity of the greece is displayed(208). The controller determines whether the viscosity of the displayed greece is set up in the normal range(210). The amount of the greece which is set up in the facility driving part is coated(220).