| 摘要 |
PURPOSE:To unify the inspecting conditions changed with the passage of time for multiple objects to be inspected and quickly obtain the precise inspection result by performing the radiation of ion beams to multiple objects to be inspected and the detection of charged particles in turn. CONSTITUTION:The first deflecting means 31 and 32 radiating ion beams to multiple objects to be inspected A and B in turn and the second deflecting means 34 and 35 operated synchronously with the first deflecting means and guiding the charged particles 8 generated from the radiation portions of ion beams of multiple objects to be inspected A and B to a detecting means 23 are provided. The ion beams are displaced by a deflector control section 33, and the radiation of the ion beams to the multiple objects to be inspected A and B and the detection of charged particles are performed in turn. The inspecting conditions changed with the passage of time such as the degree of vacuum in a vacuum chamber, the partial pressure of the atmospheric gas, the current and current distribution density of ion beams, and extracting conditions of secondary ions are unified for multiple objects to be inspected, no complicated correction is required, and the precise inspection result can be quickly obtained. |
