| 摘要 |
<p>PURPOSE:To enable a high-accuracy alignment by a method wherein sample image data on marks approximated most to reference image data are calculated and the position of a semiconductor wafer is corrected on the basis of the amounts of shifting of the sample image to image sensing units, in other words, a frame checker. CONSTITUTION:Reference image data on marks (m1) and (m2) are stored in advance in a first storage means 9. A discriminating means 11 compares data on a multitude of sample images imaged by image sensing units 81 and 82 with the reference image data and calculates a sample image having data approximated most to the reference image data. An arithmetic means 12 calculates the amount ( x) of shifting in an X direction, the amount ( y) of shifting in a Y direction and the angle ( theta) of shifting in a theta direction as the amounts of shifting of the sample image obtained as the result of discrimination to the units 81 and 82. As a position correcting means 13 makes an X direction moving mechanism 4, a Y direction moving mechanism 5 and a thetarotating mechanism 6 drive and controls them on the basis of the amount ('x) of shifting, the amount ( y) of shifting and the angle ( theta) of shifting, the alignment of a frame checker to the marks (m1) and (m2) is performed correctly.</p> |
