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发明名称
FORMATION OF SEMICONDUCTOR FILM
摘要
申请公布号
JPH01103831(A)
申请公布日期
1989.04.20
申请号
JP19880023881
申请日期
1988.02.05
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
ISHII HITOSHI;TAKAHASHI TSUNEO;FUJINAGA KIYOHISA
分类号
H01L21/205;H01L31/04;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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