发明名称 SEMICONDUCTOR LASER DEVICE
摘要 PURPOSE:To enable an electrode which is formed above a semiconductor layer to be larger in width by a method wherein a region whose conductivity type is the same as that of the semiconductor layer is formed along the surface of the semiconductor layer deposited on an active layer of a light emitting region. CONSTITUTION:A high impurity concentrated n-type region 9 is formed between p-type regions 8 making its ends overlap the region 8. The n-type region 9 is formed, for instance, by injecting Si ions and its impurity concentration is set to such a degree that the part of the region 9 overlapping the p-type region 8 is made to be inverted to a p-type. The width of an electrode 7 is substantially independent of that of the active layer 3. By these processes, the width W of the active layer 3 of a light emitting region is made to be narrowed to 0.5mum and the width of the electrode 7 can be made to be much larger that 2mum as compared with that of the active layer 3.
申请公布号 JPH01103891(A) 申请公布日期 1989.04.20
申请号 JP19870262124 申请日期 1987.10.16
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KUME MASAHIRO;SUGINO TAKASHI;YOSHIKAWA AKIO;YAMAMOTO ATSUYA;HIROSE MASANORI;NAKAMURA AKIRA
分类号 H01S5/00;H01S5/042;H01S5/343 主分类号 H01S5/00
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