| 摘要 |
PURPOSE:To eliminate the error by spherical aberration by correcting the magnification of a microscope in a focal position with the magnification correction factor based on the spherical aberration of a microscopic lens system to determine the eccentricity of a core in two directions, then executing core alignment. CONSTITUTION:The focal position of the microscope is so determined that an observed dark part width 3 is constant in order to eliminate the error of the position measurement of the core 1a generated by the fluctuation in the dark part which 3 occurring in the spherical aberration of the microscopic lens system 2. The magnification of the microscope in this focal position is corrected with the magnification correction factor based on the spherical aberration of the microscopic 2 to determine the eccentricity of the core 1a, by which the core alignment is executed. The observed dark part width 3 is corrected in accordance with the spherical aberration of the microscopic lens system 2 and the eccentricity of the core 1a is determined after the focal position of the microscope is determined in accordance with the corrected dark part width, by which the core alignment is executed. |
