BIOSENSOR USING NANOSCALE MATERIAL AS A CHANNEL OF TRANSISTOR AND METHOD OF FABRICATING THE SAME

摘要

A biosensor using nano-material as a channel of a transistor and a manufacturing method thereof are provided to read difference of conductance through a first signal wire and a second signal wire as the nano-structure of a semiconductor shows specific conductance in case a probe is combined with a bio-sample. A biosensor using nano-material as a channel of a transistor comprises: a first and second signal wires(150,160) installed inside an insulating layer; a nano-structure of a semiconductor electrically connected to the first signal wire and the second signal wire; and a plurality of probes(200) combined on the nano-structure of the semiconductor. The nano-structure of the semiconductor shows specific conductance in case the probe is combined with a bio-sample.