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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH01103870(A)
申请公布日期
1989.04.20
申请号
JP19880172659
申请日期
1988.07.13
申请人
OKI ELECTRIC IND CO LTD
发明人
SHIMODA KOICHI
分类号
H01L21/8222;H01L21/331;H01L27/08;H01L27/082;H01L29/72;H01L29/73;H01L29/732
主分类号
H01L21/8222
代理机构
代理人
主权项
地址
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