| 摘要 |
PURPOSE:To lessen partial shadow gradation by making X-ray emitted from an X-ray source as parallel light by the use of a paraboloid mirror, using a monocrystal superconductor en route the parallel light and providing a film of excellent permeability of the parallel light of a single wave front. CONSTITUTION:X-rays 2 emitted from an X-ray source 1 are converted into parallel light by the use of a paraboloid mirror 3, only the parallel light having a vertical wave front in the direction of crystal by a filter which is a supercon ductor is emitted, irradiating a mask 5, and the image is transferred to a wafer 6. A monocrystal superconductor is used as a filter 4, permeability of only a plane wave having a vertical wave front in the crystal direction of monocrystal is approximately 100% by superconductive performance because the monocrystal direction is aligned with optical axial direction of the mirror 3, and the other have every small permeability. Since the coherence of the parallel light emitted through the filter 4 is high and the light emitted from the mask 5 is almost parallel transferred to the wafer 5 except the case where a lattice interval of the mask 5 is near to using wave length, partial shadow gradation is not produced. |
