发明名称 Process for operating an exposure apparatus and exposure apparatus for conducting this process.
摘要 <p>A process for obtaining uniform light distribution in an exposure apparatus having at least one fluorescent light tube comprising heating the light tube along most of its length to a temperature above ambient temperature prior to activating the exposure apparatus. This invention also relates to an exposure apparatus designed for performing the process of the instant invention which comprises (a) a housing; (b) at least one fluorescent light tube contained within the housing; (c) a means for producing heat located within the housing; and (d) a means, located within the housing, for circulating the heat produced by the heating means.</p>
申请公布号 EP0312002(A2) 申请公布日期 1989.04.19
申请号 EP19880116918 申请日期 1988.10.12
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 ULRICH, PETER;WEIHE, HANS PETER
分类号 G03B27/16;G03F7/20;H01J61/52 主分类号 G03B27/16
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