发明名称 |
Process for operating an exposure apparatus and exposure apparatus for conducting this process. |
摘要 |
<p>A process for obtaining uniform light distribution in an exposure apparatus having at least one fluorescent light tube comprising heating the light tube along most of its length to a temperature above ambient temperature prior to activating the exposure apparatus. This invention also relates to an exposure apparatus designed for performing the process of the instant invention which comprises (a) a housing; (b) at least one fluorescent light tube contained within the housing; (c) a means for producing heat located within the housing; and (d) a means, located within the housing, for circulating the heat produced by the heating means.</p> |
申请公布号 |
EP0312002(A2) |
申请公布日期 |
1989.04.19 |
申请号 |
EP19880116918 |
申请日期 |
1988.10.12 |
申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
ULRICH, PETER;WEIHE, HANS PETER |
分类号 |
G03B27/16;G03F7/20;H01J61/52 |
主分类号 |
G03B27/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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