| 发明名称 |
A method of modifying a surface of a body using electromagnetic radiation. |
| 摘要 |
<p>A method of modifying a surface of a body such as a semiconductor body is described in which a beam of electromagnetic radiation is directed towards the surface so that the electromagnetic radiation is incident on the surface at or near the Brewster angle, the electromagnetic radiation incident on the surface preferably being so polarised that the electric vector of the electromagnetic radiation lies in the plane of incidence of the electromagnetic radiation at the surface.</p> |
| 申请公布号 |
EP0312152(A2) |
申请公布日期 |
1989.04.19 |
| 申请号 |
EP19880202180 |
申请日期 |
1988.10.03 |
| 申请人 |
PHILIPS ELECTRONIC AND ASSOCIATED INDUSTRIES LIMITED;N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
DOBSON, PETER JAMES;NEAVE, JAMES HAMILTON |
| 分类号 |
H01L21/203;B01J19/08;C23C16/48;H01L21/20;H01L21/205;H01L21/268 |
主分类号 |
H01L21/203 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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