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发明名称
Depositing surface layers using ion beans
摘要
申请公布号
GB2208875(A)
申请公布日期
1989.04.19
申请号
GB19880019752
申请日期
1988.08.19
申请人
* SCIENTIFIC COATINGS
发明人
JOHN ALAN * STEVENSON;ROBERT * HILL;RUSSELL BRUCE * HORNEY
分类号
C23C14/22;H01L39/24
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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