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发明名称
ELEMENT ISOLATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01101649(A)
申请公布日期
1989.04.19
申请号
JP19870260007
申请日期
1987.10.15
申请人
NEC CORP
发明人
NISHISAKA TEIICHIROU
分类号
H01L21/8234;H01L21/316;H01L21/76;H01L27/08;H01L27/088
主分类号
H01L21/8234
代理机构
代理人
主权项
地址
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