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发明名称
PROBE DEVICE
摘要
申请公布号
JPH01101476(A)
申请公布日期
1989.04.19
申请号
JP19870259202
申请日期
1987.10.14
申请人
TOKYO ELECTRON LTD
发明人
KARASAWA WATARU
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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