发明名称 APPEARANCE INSPECTION DEVICE
摘要 PURPOSE:To correctly inspect a mark displayed by a laser irradiation by measuring the quantity of designated color in the color picture of an inspected pattern and collating to a standard value. CONSTITUTION:An IC1 in which the mark 3 is displayed on a package 2 by a laser marking device 4 is photographed by a color television camera 10. In this picture signal, a signal corresponding to a color previously designated by a color designating part 12 is extracted in a designated color extracting part 11. The signal of an extracted mark picture is inputted to a designated color quantity measuring part 13 and quantitatively measured. Then, it is compared and decided with the standard value of a standard value setting part 14 in a decision part 15 and the IV IC1 decided to the effective is fed to a defective storing part 8 through a non-defective and defective sorting part 16. Thereby, like the mark, etc., extracted by the laser irradiation, the propriety of the mark can be correctly decided even when the difference of brightness and dark against the background is small.
申请公布号 JPH01100677(A) 申请公布日期 1989.04.18
申请号 JP19870257110 申请日期 1987.10.14
申请人 HITACHI LTD 发明人 OBATA OSAMU;NAGAI HARUO
分类号 G01N21/88;G01N21/93;G06T7/00;H01L21/66;H01L23/00 主分类号 G01N21/88
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