发明名称 |
Vacuum pump having an rpm-measuring device |
摘要 |
A vacuum pump has a housing, a pump shaft having a terminal shaft portion, a bearing member mounted in the housing and supporting the pump shaft and a rotor affixed to the pump shaft. The housing has a housing wall forming a side chamber with the bearing member. The terminal shaft portion projects through the bearing member into the side chamber. There is further provided a device for measuring the rpm of the rotor. The device comprises an inductive sensor held in the housing wall and a ferromagnetic member mounted on the terminal shaft portion for rotation in unison therewith. The ferromagnetic member induces electric pulses in the inductive sensor at a rate proprotionate to the rpm of the rotor. A non-magnetic partition separates the inductive sensor from the side chamber.
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申请公布号 |
US4822251(A) |
申请公布日期 |
1989.04.18 |
申请号 |
US19880162222 |
申请日期 |
1988.02.29 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
AMRATH, HANS;SZOECS, ZOLTAN |
分类号 |
G01F3/10;F04B37/16;F04B39/00;F04C28/28;F04D15/00;(IPC1-7):F04B39/00;F01D25/00 |
主分类号 |
G01F3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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