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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0199235(A)
申请公布日期
1989.04.18
申请号
JP19870257620
申请日期
1987.10.13
申请人
FUJITSU LTD
发明人
KATO ICHIRO
分类号
H01L21/306;H01L21/302;H01L21/316;H01L21/76;H01L21/762
主分类号
H01L21/306
代理机构
代理人
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