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发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPH0198220(A)
申请公布日期
1989.04.17
申请号
JP19870256593
申请日期
1987.10.12
申请人
SANYO ELECTRIC CO LTD
发明人
MAEDA KATSUNOBU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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