| 摘要 |
PURPOSE:To facilitate the visual end point deciding work of wet etching by inserting a contrast board, whose color is a contrast to the color of a metallic photomask, to the rear face of a mask holder which holds the metallic photomask in an etching liquid. CONSTITUTION:A movable shaft 1 connected to a motor is branched into two arms 2, and a mask holder 4 adapted to the size of the metallic photomask to be subjected to wet etching is inserted along grooves 3 provided in terminals of these arms. The holder 4 has two supporting poles 5 and each supporting pole 5 is provided with a stop pin 6 and a guide pin 7, and the metallic photomask 8 is supported between both supporting poles by stop pins 6. A square white contrast board 9 which is larger than the photomask 8 and contrasts with black of the photomask 8 is provided in the rear face part of the mask holder 4. Thus, the boundary between the black part having a resist and the etched transparent part which has not a resist is more distinctly recognized visually to easily decide the end point. |
