| 摘要 |
PURPOSE:To provide a slitted nozzle plate with sufficient mechanical strength by a structure wherein a nozzle plate includes zigzagged slit nozzles overlapped with each other with the lap wider than a heating element 1, and a heater array includes a number of zigzagged heating elements corresponding to the slit nozzles. CONSTITUTION:Slit nozzle openings 200 with a given length are arranged in a zigzag shaped on a nozzle plate 202. The slit nozzle openings 200 are through holes in the nozzle plate 202. When the slited nozzle plate 202 is made of metal, the slit nozzle openings 200 may be formed by electroplating, photoetching, or punching. A heater array 204 can be formed on a substrate by vapor deposi tion or sputtering. The materials of the heater include a silicide, carbide, boride, or nitride of Ti, Mo, W, V, Nb, Zr, or Ta, or nichrome or the like. The sub strate is of ceramic or glass. The heater array is covered with a protective layer. |
