| 摘要 |
PURPOSE:To reduce the variance in reproduced output, by forming a magnetic substance layer by making ion beams consisting of evaporated particles of ferromagnetic substance metal forming the magnetic substance layer incident to a base through sequentially different incident angles. CONSTITUTION:In a vacuum tank kept at a high vacuum, an evaporation source magnetic material 9 is bombarded with electron beams by a deflection E gun of an ion source unit 1 for heating and evaporation to form evaporated particles, and a filament 10 is heated and energized with power supplies 20, 21 located at the outside of the vacuum tank to discharge thermoelectrons 2. Further, a negative DC voltage is applied and the said particles are bombarded by accelerating electric field for the said electrons for ionization, and the said evaporated particle ions are accelerated by electric field with an accelerated electrode 6 applied by a negative high voltage from a power supply 22 to obtain ion beams, and the beams are irradiated on a base 2 running at different incident angles at guide rolls 26, 27, 28. |
