| 摘要 |
A large door 22 for mounting a magazine 30 in a magazine holding part 26 or removing the magazine from the magazine holding part 26 is provided with an upper small door 23 with which it is possible to resupply wafers into an upper slot group (upper wafer resupply position) in the magazine 30, and a lower small door 24 with which it is possible to resupply wafers into a lower slot group (lower wafer resupply position) in the magazine 30. It is thereby possible, while feeding a component P (wafer) from pallets accommodated in some of the slots 32 of one magazine 30, to resupply the component P into other slots 32. |
