| 摘要 |
PURPOSE:To detect a shift of a distance between the tip of a nozzle of a spraying device and a position of the surface of a sample by providing a light source coaxially with a spraying axis of an organic compound, radiating its light onto the sample surface and detecting its reflected light. CONSTITUTION:An ion from an ion source 1 passes through a lens system and becomes a focusing beam 5, and scans the surface of a sample. As a result, a secondary charged particle emitted from the sample is detected 9, and after its A/D conversion 10, a state of an element, etc., of the sample in displayed. By this display state and a data to an XY stage, the stage is moved, and a desired position of the s ample is set within a scanning range of the beam. A light source 23 is provided on a production being opposite to the nozzle tip direction of a axis of a hole 22 of a nozzle 21 of a device for spraying organic compound vapor, and light passes coaxially through the spraying axis of vapor. This light is reflected by the sample surface and radiated to a position detector 24, and by detecting an irradiated point on the detector 24, a shift of a distance between the nozzle 21 and a position of the sample surface can be detected. |
