发明名称 MARKING METHOD
摘要 PURPOSE:To use a character having high visibility effectively by a method wherein a mirror reflection surface is coated with a light or beam sensitive substance, and exposed and developed by ultraviolet rays to a dot pattern having a specific shape, the sensitive substance is removed and a dot-pattern surface is left. CONSTITUTION:A substrate 1 has a cleaned polished flat surface to be marked, and must have mirror reflectivity to surrounding light. An oxide layer 15 is grown on the flat surface of the substrate 11 within a temperature range of approximately 900-1200 deg.C. A photosensitive layer 17 or a layer 17 sensitive to electron beams is applied onto the oxide layer 15. The sensitive layer 17 is composed normally of a photo-resist 29 or a resist. An arbitrary proper ultraviolet ray source (such as electron) such as beams 23 are used, and the photo- resist 29 is exposed selectively through a mask 19. A plurality of dots having size smaller than 50mum and pitches of 8-50mum are exposed to a dot pattern shape in the exposure of the photo-resist 29. The dots are developed so that soft sections in the photo-resist 29 are removed, and the dots can be visually observed finally.
申请公布号 JPH0198214(A) 申请公布日期 1989.04.17
申请号 JP19880223347 申请日期 1988.09.06
申请人 YOKOGAWA HEWLETT PACKARD LTD 发明人 JIEEMUSU BAANAADO KURUUGAA
分类号 H01L21/66;G03F7/00;H01L21/02;H01L23/544 主分类号 H01L21/66
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