SECTION FORM MEASUREMENT METHOD

摘要

PURPOSE:To obtain a correct section form even when a slanting component except in the direction connecting two light sources by finding a slanting component in the direction connecting light sources of a picture element of a subject from a corresponding relation of two kind of brightness and surface slant to the same point. CONSTITUTION:Electron rays 13 emitted from an electron gun 12 in a reflector 11 of a scanning electron microscope are polarized by an electron system 14 to be converged and incident on a sample 16 on a sample stand 15. Emitted secondary electrons 17 are detected by a left detector 18 and a right detector 19. Signals taken in by the detectors 18 and 19 are operated by a computer 101 independently operating by instruction from a keyboard 102 so as to display the operation results on a display 103. The computer 101 finds a slanting component in the direction connecting light sources of a picture element of a subject by using a corresponding relation of two kinds of brightness and surface slant to the same point so as to be able to correctly find a section form in the direction connecting light sources by using this.