发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To enable a stable and automatic supply of wire to be made by arranging two air tensioners separately, namely one facing down and the other facing up. CONSTITUTION:The lower part of a wire spool 1 where wire was rolled is provided with the first air tensioner 5 which was mounted to constantly blow wire downward and the second air tensioner 8 which was arranged away from this air tensioner 5 and was mounted to constantly blow wire upward. The air tensioner 8 constantly blows the wire 1 downward to allow the wire 1 between a wire spool 10 and the air tensioner 8 to constantly keep a certain tension downward for preventing scattering of wire at the wire spool 10 and for securely blowing the wire 1 to a touch sensor 30 to remove chattering, thus preventing excessive supply of wire. Also, since the wire 1 bends like an S character between the air tensioner 8 and an air tensioner 5, sufficient amount of space is provided for supplying the wire 1 to cope with the supply speed of the wire 1 of wire bonding.
申请公布号 JPH0196939(A) 申请公布日期 1989.04.14
申请号 JP19870255960 申请日期 1987.10.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 ISHIZUKA MITSUHIRO;SHINOHARA MASUO
分类号 H01L21/60 主分类号 H01L21/60
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