摘要 |
PURPOSE:To improve productivity and to enable a mold with stable quality to be obtained by providing a heat insulating material between the head and main unit of a plunger which advances or retreats within a pot. CONSTITUTION:A heat insulating material 13 for preventing transmission of heat is provided between a plunger main unit 11a and a coupler 11b and a through hole 14 is provided at the central part to allow a coupling bolt 12 to be inserted through. In a semiconductor resin sealing device thus constituted, the part between a plunger main unit 11a and a head 11c is insulated against heat so that transmission of heat of the head 11c to the drive device side can be prevented. Thus, since a plunger 11 is provided with a function for keeping temperature of the head 11c on sealing resin, a tablet 3 within a chamber 1a can be fully heated by heat from a pot 1 to increase curing speed of the tablet 3. |