| 摘要 |
PURPOSE:To attain the memory output of a non-contact, atom. level and molecule level by scanning the tip part of a fine acicular device manufactured with a semiconductor processing technology close to the surface of a memory part and controlling an impressed voltage. CONSTITUTION:At an arm 4, an acicular device operating part 7 is fitted, and by turning a dial 6, the operating part 7 can be moved in a vertical direction. The scanning in the in-plane direction is executed by controlling a three- dimensional piezoelectric element incorporated into the acicular device operating part 7 with an X and Y axis control part 13. For an acicular device 8, a conducting part and an insulating part are alternately arranged on a plane on a semiconductor substrate, and to the conducting part, the conducting needle where the tip is composed of one to several atoms. is connected. The voltage impressed to respective conducting parts can be respectively controlled indepen dently. A rough adjusting control part, a Z axis control part, an XY axis control part 13 and a voltage control part 10 can be controlled by a computer 4. |
