| 摘要 |
PURPOSE:To equalize temperature distribution in a subject matter by forming a torous space between heating coils, forming vent ports in a heating coil supporting table for cooling air to pass, and disposing heat insulating material at the top surface of the heating coils to cover the whole surface of the heating coils. CONSTITUTION:Heating coils 9 include a torous space formed for equalizing temperature distribution in a subject matter 11, and a heating coil supporting table 10 includes vent ports formed for cooling air to pass. Heat insulating material 12 is of a form to cover the whole surface of the heating coils 9, closing the center and the torous space in the heating coils 9. Partial cooling is not performed, therefore, at a top plate part 8 over the heating coils 9, thereby equalization of temperature distribution in a subject matter 11 can be improved. Cooling effect for the heating coils 9 is further increased because cooling air is applied from the vent ports in the heating coil supporting table 10 to the heating coils 9. |
