METHOD OF MONITORING SINGLE CRYSTAL DURING GROWTH

摘要

A single crystal (3) during growth is irradiated by an transversely elongate X-ray beam (9) and the diffracted X-ray beam (10) from the crystal (3) is monitored by an image amplifier (11) in a two dimensional manner so that the diffracted X-ray can be monitored by the image amplifier even if there occurs change of the diameter of the crystal (3). In a further method, a half portion of the single crystal (3) during growth is irradiated by a transversely elongate X-ray beam and the other half portion of the crystal is irradiated by the X-ray beam over the entire height of the crystal so that the Laue spots of the crystal growth are displayed on one half portion of the display of the image amplifier (11) and a shape of the crystal being pulled up is monitored in another half portion of the display of the image amplifier.