APPARATUS AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR,申请号JP19870254313-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR
摘要
申请公布号	JPH0195517(A)	申请公布日期	1989.04.13
申请号	JP19870254313	申请日期	1987.10.08
申请人	MITSUBISHI RAYON CO LTD	发明人	KAWANISHI HIDEO;ICHIMURA KIYOSHI;TOSHI AKIHITO
分类号	C30B25/12;H01L21/205	主分类号	C30B25/12
代理机构		代理人
主权项
地址

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