| 摘要 |
PURPOSE:To realize efficient optical coupling by providing a hole, which piercing a substrate, between an optical waveguide and a groove. CONSTITUTION:A hole 6 piercing a substrate 1 is provided between an optical waveguide 2 and an optical fiber supporting groove 3 by a simple and high- precision fine working method. Si having crystal face azimuth (100) is used as the substrate 1 and the optical waveguide 2 is a quartz single mode optical waveguide. The material of the core of the optical waveguide 2 is SiO2+TiO2, and the material of the clad around the core is SiO2+P2O5+B2O3, and a quartz single mode optical fiber is used as an optical fiber 4. Since a V groove 3 is formed by crystal face (111), the angle of the V groove 3 is crystal-graphically determined; and the width of the V groove 3 is so designated that the optical waveguide 2 and the optical axis of the optical fiber 4 coincide with each other at the time of arranging the optical fiber 4 in the V groove 3, and the crystal face azimuth of the side face of a hole 5 is (110) and the width of its sectional shape is made equal to that of the V groove 3. Thus, efficient optical coupling is realized. |
