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发明名称
MANUFACTURE OF FILM
摘要
申请公布号
JPH0193117(A)
申请公布日期
1989.04.12
申请号
JP19870249722
申请日期
1987.10.05
申请人
NEC CORP
发明人
ASAKURA FUJIO
分类号
C23C14/34;C23C14/14;H01L21/28;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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