| 摘要 |
PURPOSE:To eliminate an electric loss and to prevent disconnection of a minute conductor layer pattern due to Joule's heat by using a superconductor thin film in this pattern. CONSTITUTION:Ceramic material 1 is washed and the superconductor thin film is formed on the outside peripheral surface of the material 1. The superconductor thin film is trimmed by irradiation of a laser beam to form a micro strip line 2. That is, cylindrical ceramic materials 1 fixed to a hook 9 are put in a vacuum vessel 6, and the vessel 6 is desired, and a film forming source 8 is heated by a heater 7 until vapor is generated. It is ionized by glow discharge simultaneously with generation of vapor and is successively accumulated on the surface of the materials 1 to form the superconductor thin film. Since cylindrical ceramic materials 1 are rotated at a required speed by a driving motor 10 during this formation, the uniform thin film is obtained. |
