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发明名称
METHOD FOR HEAT TREATMENT
摘要
申请公布号
JPH0193112(A)
申请公布日期
1989.04.12
申请号
JP19870250900
申请日期
1987.10.05
申请人
TEL SAGAMI LTD
发明人
WADA ATSUSHI;OKASE WATARU
分类号
H01L21/31;H01L21/205;H01L21/22
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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