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发明名称
DEVICE FOR MEASURING THE ANGULAR DISTRIBUTION OF CHARGED PARTICLES DIFFRACTED ON A SAMPLE SURFACE
摘要
申请公布号
EP0152501(B1)
申请公布日期
1989.04.12
申请号
EP19840101690
申请日期
1984.02.18
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
HENZLER, MARTIN, PROF. DR.
分类号
G01Q10/00;H01J37/295;(IPC1-7):H01J37/295;G01N23/207
主分类号
G01Q10/00
代理机构
代理人
主权项
地址
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