发明名称 |
Laser beam working system |
摘要 |
A laser working system comprises supplying means for supplying a laser beam, a working unit which includes a stage for supporting a workpiece and means for exposing the workpiece to the laser beam, and a room unit which includes wall means for surrounding the working unit and accomodates the working unit to spatially isolate it from outside of the wall means. The supplying means is arranged outside the room unit and includes first and second laser units each for generating the laser beam. The laser working system further comprises beam guiding means which creates first light path for optically communicating the first laser unit with the working unit through the wall means, and second light path for optically communicating the second laser unit with the working unit through the wall means, respectively.
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申请公布号 |
US4820899(A) |
申请公布日期 |
1989.04.11 |
申请号 |
US19880161944 |
申请日期 |
1988.02.29 |
申请人 |
NIKON CORPORATION |
发明人 |
HIKIMA, IKUO;MIYAJI, AKIRA;KAMIYA, SABURO;TANIMOTO, AKIKAZU |
分类号 |
B23K26/067;H01R43/02;(IPC1-7):B23K26/00 |
主分类号 |
B23K26/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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