Quick change sputter target assembly,申请号US19880176911-传众专利搜索

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发明名称	Quick change sputter target assembly
摘要
申请公布号	US4820397(A)	申请公布日期	1989.04.11
申请号	US19880176911	申请日期	1988.04.04
申请人	TOSOH SMD, INC.	发明人	FIELDER, KENNETH B.;BELLI, ROBERT L.;FUCHS, CONRAD E.
分类号	C23C14/34;H01J37/34;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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