FINELY ADJUSTING MECHANISM

摘要

PURPOSE: To speed up a long-distance traveling by using two sets of actuators that are extended or shrink in moving direction. CONSTITUTION: Piezoelectric actuators 7a and 7b that are extended or shrink in the direction of an arrow are coupled to a moving member 5. Piezoelectric elements 8a1 and 8a2 and 8b1 and 8b2 for making connection to or releasing fixed members 6a-6c are provided at the other edges of the piezoelectric elements 7a and 7b. The piezoelectric elements 8a1 and 8a2 are excited and are coupled to the fixed members 6a and 6c and the piezoelectric element 7a for traveling is excited and the moving member 5 is moved. Then, the other is piezoelectric elements 8b1 and 8b2 for clamping are coupled to the fixed members 6b and 6c and at the same time the connection by the piezoelectric elements 8a1 and 8a2 is canceled, the piezoelectric element 7b is excited, and the moving member 5 is further moved. The member 5 can be moved with less number of operations than a conventional device, thus increasing speed.