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发明名称
Method for cleanup processing chamber and vacuum process module
摘要
申请公布号
US4820377(A)
申请公布日期
1989.04.11
申请号
US19870074422
申请日期
1987.07.16
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
DAVIS, CECIL J.;MATTHEWS, ROBERT T.;JUCHA, RHETT B.;LOEWENSTEIN, LEE M.
分类号
C23C14/22;C23C14/24;C23C16/48;C23C16/517;C23C16/54;C23F4/00;(IPC1-7):B44C1/22;C03C15/00;C03C25/06
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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