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发明名称
SURFACE TREATING DEVICE
摘要
申请公布号
JPH0191423(A)
申请公布日期
1989.04.11
申请号
JP19870247829
申请日期
1987.10.02
申请人
HITACHI LTD
发明人
HIRAOKA SUSUMU;SUZUKI KEIZO;NISHIMATSU SHIGERU
分类号
H01L21/205;H01L21/302;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
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